A novel pressure sensor based on Fabry-Perot interferometry and micro-electromechanical system (MEMS) technology is proposed and demonstrated. Fabrication process and packaging configuration. Fiber-optic sensing (FOS) technology has emerged as a cutting-edge research focus in the sensor field due to its miniaturized structure, high sensitivity, and remarkable electromagnetic interference immunity. Compared with conventional sensing technologies, FOS demonstrates superior capabilities in. To meet the pressure measurement requirements of deep earth exploration, we propose an OFPS (optical fiber pressure sensor) with self-temperature compensation based on MEMS technology. In more advanced sensors, the measurement of phase difference allows very accurate measurement of small pressure.
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